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Ion beam synthesis of buried FeSi2 in (100) silicon

✍ Scribed by D. Panknin; E. Wieser; R. Groetzschel; W. Skorupa; D. Baither; H. Bartsch; G. Querner; A. Danzig

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
331 KB
Volume
12
Category
Article
ISSN
0921-5107

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