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Investigations on hardness of rf sputter deposited SiCN thin films

✍ Scribed by K.B Sundaram; Z Alizadeh; R.M Todi; V.H Desai

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 250 KB
Volume: 368
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2003.09.103

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