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Investigation of rf sputtered CrSiO thin resistor films

✍ Scribed by M Czermann; I Trifonov; G Katona; O Geszti; A Sulyok

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 107 KB
Volume: 40
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)90213-i

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