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Investigation of the annealing behavior of damage in Si implanted InP by photoacoustic and Raman spectroscopy

โœ Scribed by Hiroshi Kuwahata; Fumiya Uehara; Tokue Matsumori; Nobuo Muto


Book ID
114168840
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
348 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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