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Photoacoustic monitoring of damage in ion implanted and annealed si layers

✍ Scribed by L. Luciani; U. Zammit; M. Marinelli; R. Pizzoferrato; F. Scudieri; S. Martellucci

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sub-gap absorption study of defects in i

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Ion-implantation damage and annealing ef

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Accumulation and annealing of implantati

✍ H. Stitzl; G. Krötz; G. Müller 📂 Article 📅 1991 🏛 Springer 🌐 English ⚖ 554 KB

Self-annealing in ion-implanted Si and G

✍ F.F. Komarov 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 655 KB

Formation of nanocrystalline CrSi2 layer

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Non-destructive identification of end-of

✍ Yu. Shreter; J.H. Evans; B. Hamilton; A.R. Peaker; C. Hill; D.R. Boys; C.D. Meek 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 338 KB