✦ LIBER ✦

Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon

✍ Scribed by Yu. Shreter; J.H. Evans; B. Hamilton; A.R. Peaker; C. Hill; D.R. Boys; C.D. Meekison; G.R. Booker

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Non-destructive depth profiling of silic

✍ S. Lynch; M. Murtagh; G.M. Crean; P.V. Kelly; M. O'Connor; C. Jeynes 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 346 KB

Ion implantation of silicon in gallium a

✍ D. Pribat; D. Dieumegard; M. Croset; C. Cohen; R. Nipoti; J. Siejka; G.G. Bentin 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 462 KB

Annealing behavior of thin polycrystalli

✍ P. Kwizera; R. Reif 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 617 KB

Details of the damage profile in self-io

✍ P. X. Zhang; I. V. Mitchell; P. J. Schultz; D. J. Lockwood 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 570 KB

Non-destructive study of the ion-implant

✍ Anthony J. Perry; James R. Treglio; James P. Schaffer; Jean Brunner; Vaclav Valv 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 533 KB

Range distributions and thermal-annealin

✍ H.J. Whitlow; P. Blood; B.W. Farmery; D.J. O'Connor; J.M. Shannon; M.W. Thompson 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 532 KB