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Non-destructive study of the ion-implantation-affected zone (the long-range effect) in titanium nitride

✍ Scribed by Anthony J. Perry; James R. Treglio; James P. Schaffer; Jean Brunner; Vaclav Valvoda; David Rafaja


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
533 KB
Volume
66
Category
Article
ISSN
0257-8972

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