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Accumulation and annealing of implantation damage ina-Si:H

✍ Scribed by H. Stitzl; G. Krötz; G. Müller

Publisher: Springer
Year: 1991
Tongue: English
Weight: 554 KB
Volume: 53
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00324258

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