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Self-implantation of Cz-Si: Clustering and annealing of defects

✍ Scribed by D.A. Abdulmalik; P.G. Coleman; I.Y. Al-Qaradawi

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 272 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.08.072

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