Implantation of Aluminium in Silicon. Simultaneous Showing ol Self-Si Defects and of Al Precipitates

✍ Scribed by Mathé, E. L. ;Desoyer, J. C.

• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: English
• Weight: 543 KB
• Volume: 112
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211120206