Annealing behavior of damage in Si-implanted InP studied by piezoelectric detection of photoacoustic signal

✍ Scribed by Hiroshi Yoshinaga; Jun Kawai; Takaaki Agui; Fumiya Uehara; Tokue Matsumori

• Book ID: 113284733
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 372 KB
• Volume: 80-81
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(93)96188-i