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Investigation of the amorphous to microcrystalline phase transition of thin film prepared by electron cyclotron resonance chemical vapor deposition method

✍ Scribed by Chang, Teng-Hsiang; Chang, Jenq-Yang; Chu, Yen-Ho; Lee, Chien-Chieh; Chen, I-Chen; Li, Tomi

Book ID: 123588835
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 868 KB
Volume: 231
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.10.008

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