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Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD

✍ Scribed by R Martins; A Maçarico; I Ferreira; R Nunes; A Bicho; E Fortunato

Book ID: 108389245
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 146 KB
Volume: 317
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00611-1

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