✦ LIBER ✦
Study by real time ellipsometry of the growth of amorphous and microcrystalline silicon thin films combining glow discharge decomposition and UV light irradiation
✍ Scribed by N. Layadi; P. Roca i Cabarrocas; V. Yakovlev; B. Drévillon
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 414 KB
- Volume
- 233
- Category
- Article
- ISSN
- 0040-6090
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