Effects of the silicon-to-carbon ratio and the hydrogen content in amorphous SiC thin films prepared by reactive sputtering

✍ Scribed by M. Le Contellec; J. Richard; A. Guivarc'h; E. Ligeon; J. Fontenille

• Book ID: 107862633
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 313 KB
• Volume: 58
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(79)90281-5