✦ LIBER ✦

Investigation of polishing characteristics of shallow trench isolation chemical mechanical planarization with different types of slurries

✍ Scribed by Sang-Ick Lee; Jinho Hwang; Hyoungjae Kim; Haedo Jeong

Book ID: 108207689
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 773 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.12.004

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