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[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Self-Aligned LOCOS/Trench (SALOT) combination isolation technology planarized by chemical mechanical polishing

✍ Scribed by Park, T.; Ahn, S.J.; Ko, J.H.; Hong, C.G.; Kim, J.D.; Ahn, S.T.; Lee, M.Y.

Book ID: 115500124
Publisher: IEEE
Year: 1994
Weight: 314 KB
Volume: 0
Category: Article
ISBN-13: 9780780321113
DOI: 10.1109/iedm.1994.383291

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