Chemical mechanical planarization of germanium shallow trench isolation structures using silica-based dispersions

✍ Scribed by Shivaji Peddeti; Patrick Ong; L.H.A. Leunissen; S.V. Babu

• Book ID: 113797943
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 1011 KB
• Volume: 93
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2011.12.015