✦ LIBER ✦
Measurement of mechanical stresses induced by hybrid shallow-trench-isolation for dynamic random access memory using recess channel array transistor structure
✍ Scribed by Seonhaeng Lee; Dongwoo Kim; Cheolgyu Kim; T.K. Oh; S.Y. Cha; S.J. Hong; Bongkoo Kang
- Book ID
- 113797917
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 684 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0167-9317
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