𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Investigation of buried AlN layers formed by nitrogen implantation into Al

✍ Scribed by C. Lin; J.A. Kilner; R.J. Chater; J. Li; A. Nejim; J.P. Zhang; P.L.F. Hemment

Book ID
118400040
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
301 KB
Volume
80-81
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Evolution of buried compound layers form
Evolution of buried compound layers formed by ion implantation
✍ Alice E. White; Kenneth T. Short; Yong-Fen Hsieh; Robert Hull πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 1010 KB

The coalescence of buried silicide layers formed by high dose implantation in silicon and high temperature annealing occurs via a precipitate coarsening mechanism that is different in ( 100) and ( 111) silicon. The results of an extensive study of these phenomena are summarized and compared with the