✦ LIBER ✦
Structural analysis of buried AlN thin films formed by nitrogen implantation into microelectronics grade aluminium
✍ Scribed by L. Calvo; A. Pérez-Rodríguez; A. Romano-Rodríguez; J.R. Morante; J. Montserrat
- Book ID
- 113285766
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 450 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0168-583X
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