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E'1 centres in buried oxide layers formed by oxygen ion implantation into silicon

✍ Scribed by R.C. Barklie; T.J. Ennis; K.J. Reeson; P.L.F. Hemment


Book ID
113282520
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
435 KB
Volume
65
Category
Article
ISSN
0168-583X

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