✦ LIBER ✦

Investigation of BF2+ implants in silicon through SiO2 films Redistribution of fluorine and boron under rapid thermal annealing

✍ Scribed by L. Kaabi; C. Gontrand; M. Lemiti; B. Remaki; B. Balland; J. Meddeb; O. Marty

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

BF2 ion implantation in silicon through

✍ M.C. Ozturk; J.J. Wortman; W.K. Chu; G. Rozgonyi; D.P. Griffis 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 353 KB

Implantation damage and anomalous diffus

✍ Kaabi, L. ;Gontrand, C. ;Lemiti, M. ;Balland, B. 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 520 KB

Analysis of low energy boron implants in

✍ L. Kaabi; C. Gontrand; B. Remaki; F. Seigneur; B. Balland 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 729 KB

Formation of self-aligned TiSi2p+−n junc

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 578 KB

On the origins of structural defects in

✍ T. Sands; J. Washburn; E. Myers; D.K. Sadana 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 631 KB

IIB-6 recent advances in the rapid therm

✍ Vasudev, P.K.; Schmitz, A.; Olson, G.L. 📂 Article 📅 1984 🏛 IEEE 🌐 English ⚖ 168 KB