✦ LIBER ✦

BF2 ion implantation in silicon through surface oxides, behaviour of the fluorine with rapid thermal annealing

✍ Scribed by M.C. Ozturk; J.J. Wortman; W.K. Chu; G. Rozgonyi; D.P. Griffis

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Investigation of BF2+ implants in silico

✍ L. Kaabi; C. Gontrand; M. Lemiti; B. Remaki; B. Balland; J. Meddeb; O. Marty 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 588 KB

On the origins of structural defects in

✍ T. Sands; J. Washburn; E. Myers; D.K. Sadana 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 631 KB

The effect of rapid thermal treatments o

✍ L. Kaabi; B. Remaki; C. Gontrand; P.F. Lo; B. Balland 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 490 KB