✦ LIBER ✦
On the origins of structural defects in BF2+-implanted and rapid-thermally-annealed silicon: Conditions for defect-free regrowth
✍ Scribed by T. Sands; J. Washburn; E. Myers; D.K. Sadana
- Book ID
- 113277283
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 631 KB
- Volume
- 7-8
- Category
- Article
- ISSN
- 0168-583X
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