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Inversion layer carrier concentration and mobility in 4H–SiC metal-oxide-semiconductor field-effect transistors

✍ Scribed by Dhar, S.; Haney, S.; Cheng, L.; Ryu, S.-R.; Agarwal, A. K.; Yu, L. C.; Cheung, K. P.


Book ID
120303837
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
619 KB
Volume
108
Category
Article
ISSN
0021-8979

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Inversion layer electron transport in 4H
✍ Tilak, Vinayak 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 491 KB

## Abstract Silicon carbide is the only compound semiconductor with silicon dioxide as its native oxide and can form metal–oxide–semiconductor field‐effect transistors. In this article, we review the inversion layer electron transport properties of 4H‐SiC/SiO~2~. The inversion layer electron transp