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Intermetal dielectric deposition by electron cyclotron resonance chemical vapor deposition (ECR CVD)

✍ Scribed by Stephan E. Lassig; James D. Tucker

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 862 KB
Volume: 26
Category: Article
ISSN: 0026-2692
DOI: 10.1016/0026-2692(96)81856-8

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