✦ LIBER ✦
ChemInform Abstract: Application of Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD) in the Preparation of Hydrogenated SiC Films: A Comparison of Phosphorus and Boron Doping.
✍ Scribed by S. F. YOON; R. JI
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 30 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0931-7597
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