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Interdiffusion at Si/SiGe interface analyzed by high-resolution X-ray diffraction

✍ Scribed by Shuqi Zheng; M. Kawashima; M. Mori; T. Tambo; C. Tatsuyama


Book ID
108289135
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
528 KB
Volume
508
Category
Article
ISSN
0040-6090

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High resolution X-ray diffraction measurements have been done on Si(001)-based structures grown by molecular beam epitaxy (MBE). By systematically varying the angle of incidence and the diffraction angle, the diffraction intensity data can be displayed in a two-dimensional X-ray diffraction intensit