Influence of the growth temperature of AlN buffer on the quality and stress of GaN films grown on 6H–SiC substrate by MOVPE

✍ Scribed by Shuang Qu; Shuqiang Li; Yan Peng; Xueliang Zhu; Xiaobo Hu; Chengxin Wang; Xiufang Chen; Yuqiang Gao; Xiangang Xu

• Book ID: 116606761
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 670 KB
• Volume: 502
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/j.jallcom.2010.04.185