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Low-temperature growth of high quality AlN films on carbon face 6H-SiC

✍ Scribed by Myunghee Kim; Jitsuo Ohta; Atsushi Kobayashi; Hiroshi Fujioka; Masaharu Oshima

Book ID: 112182630
Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 228 KB
Volume: 2
Category: Article
ISSN: 1862-6254
DOI: 10.1002/pssr.200701246

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