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Growth of high-quality AlN with low pit density on SiC substrates

✍ Scribed by A. Nakajima; Y. Furukawa; S. Koga; H. Yonezu

Book ID: 108165743
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 373 KB
Volume: 265
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2004.02.014

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