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Influence of source gas supply sequence on hydride vapor phase epitaxy of AlN on (0001) sapphire substrates

✍ Scribed by Rie Togashi; Toru Nagashima; Manabu Harada; Hisashi Murakami; Yoshinao Kumagai; Hiroyuki Yanagi; Akinori Koukitu

Book ID: 116630064
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 470 KB
Volume: 360
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2011.10.014

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