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Optimization of High-Quality AlN Epitaxially Grown on (0001) Sapphire by Metal-Organic Vapor-Phase Epitaxy

✍ Scribed by Y.A. Xi; K.X. Chen; F. Mont; J.K. Kim; E.F. Schubert; C. Wetzel; W. Liu; X. Li; J.A. Smart

No coin nor oath required. For personal study only.

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