Growth of Crack-Free and High-Quality AlGaN with High Al Content Using Epitaxial AlN (0001) Films on Sapphire

✍ Scribed by Kida, Y. ;Shibata, T. ;Naoi, H. ;Miyake, H. ;Hiramatsu, K. ;Tanaka, M.

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 144 KB
• Volume: 194
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200212)194:2<498::aid-pssa498>3.0.co;2-k