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Influence of rapid thermal process on intrinsic gettering in fast neutron irradiated Czochralski silicon

โœ Scribed by Gui-feng CHEN; Yang-xian LI; Xing-hua LI; Li-li CAI; Qiao-yun MA; Ping-juan NIU; Sheng-li NIU; Dong-feng CHEN

Book ID
117693061
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
537 KB
Volume
16
Category
Article
ISSN
1003-6326

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