✦ LIBER ✦
Influence of rapid thermal annealing on the specific features of defect generation in silicon wafers during the formation of effective internal getters
✍ Scribed by M. V. Mezhennyi; M. G. Milvidskii; V. J. Resnick
- Book ID
- 110203118
- Publisher
- Pleiades Publishing
- Year
- 2009
- Tongue
- English
- Weight
- 490 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1027-4510
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