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Influence of plasma parameters on the growth and properties of magnetron sputtered CN[sub x] thin films

✍ Scribed by Hellgren, Niklas; Macák, Karol; Broitman, Esteban; Johansson, Mats P.; Hultman, Lars; Sundgren, Jan-Eric

Book ID: 121665164
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 646 KB
Volume: 88
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.373690

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