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Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films

✍ Scribed by K. Ellmer; F. Kudella; R. Mientus; R. Schieck; S. Fiechter

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
873 KB
Volume
247
Category
Article
ISSN
0040-6090

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