Influence of low-energy bombardment of an RF magnetron sputtering discharge on texture formation and stress in ZnO films

✍ Scribed by R. Kaltofen; G. Weise

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 447 KB
• Volume: 200
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(93)90312-m