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Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique

✍ Scribed by H. Bender; J. Brutscher; W. Ensinger; R. Günzel; J. Halder; H. Klein; B. Rauschenbach; J. Schäfer; B. Seiler; R. Thomae

No coin nor oath required. For personal study only.

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