Surface hydrogen incorporation and profile broadening caused by sheath expansion in hydrogen plasma immersion ion implantation

✍ Scribed by Zhineng Fan; Xuchu Zeng; Dixon Tar-Kun Kwok; Chu, P.K.

• Book ID: 114558913
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 117 KB
• Volume: 28
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.848095