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Influence of magnetic field on magnetized hydrogen plasmas in plasma immersion ion implantation

✍ Scribed by D.L. Tang; R.K.Y. Fu; X.B. Tian; P. Peng; P.K. Chu

Book ID
114167185
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
126 KB
Volume
206
Category
Article
ISSN
0168-583X

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Plasma immersion ion implantation (PIII) employing high-voltage glow discharge is an effective tool to achieve better material properties without external plasma sources. The efficacy of high-voltage glow discharge can be enhanced by the use of a magnetic field. Our experimental results disclose tha