Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma

✍ Scribed by Tong, Honghui; Fu, Ricky K. Y.; Tang, Deli; Zeng, Xuchu; Chu, Paul K.

• Book ID: 121329750
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 351 KB
• Volume: 92
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1499983