Comparative Study of an RF and a Microwave High-Density-Plasma Source for Plasma Immersion Ion Implantation

✍ Scribed by S. N. Averkin; A. P. Ershov; A. A. Orlikovsky; K. V. Rudenko; Ya. N. Sukhanov

• Book ID: 111551696
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 96 KB
• Volume: 32
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1023/a:1025569917849