✦ LIBER ✦
A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation
✍ Scribed by F.B. Yeh
- Book ID
- 108141210
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 271 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0017-9310
No coin nor oath required. For personal study only.