✦ LIBER ✦
Two-dimensional modeling and simulation for dynamic sheath expansion during plasma immersion ion implantation
✍ Scribed by Shu Qin; Yuanzhong Xhou; Chung Chan
- Book ID
- 114558766
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 288 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0093-3813
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