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Influence of germanium doping on the mechanical strength of Czochralski silicon wafers

✍ Scribed by Chen, Jiahe; Yang, Deren; Ma, Xiangyang; Zeng, Zhidan; Tian, Daxi; Li, Liben; Que, Duanlin; Gong, Longfei

Book ID: 124067357
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 881 KB
Volume: 103
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2943272

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