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Influence of anisotropic etching on the mechanical strength of single-crystal silicon wafers

✍ Scribed by Gasanli, Sh. M. ;Gasanly, N. M. ;Streltsov, A. K.

Book ID: 105382823
Publisher: John Wiley and Sons
Year: 1991
Tongue: English
Weight: 309 KB
Volume: 127
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211270113

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