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On the Mechanism of Anisotropic Etching of Silicon

โœ Scribed by Elwenspoek, M.


Book ID
121402192
Publisher
The Electrochemical Society
Year
1993
Tongue
English
Weight
854 KB
Volume
140
Category
Article
ISSN
0013-4651

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โœ Lee, D. B. ๐Ÿ“‚ Article ๐Ÿ“… 1969 ๐Ÿ› American Institute of Physics ๐ŸŒ English โš– 682 KB
Anisotropic etching of silicon in hydraz
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